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Focused ion beam and electron beam system (FEI Helios 600i)

Focused ion beam and electron beam system (FEI Helios 600i)

Responsible teacher：

C. Robert Kao

Technican：

Ms. Hsiao-Hsuan Chen

Telephone：

886-2-3366-1350

Location：

Room 130, College of Engineering

Features：

1.In-situ depth cutting and microstructure characterization

2.Sample preparation for TEM analysis

3.OmniProbeAutoProbeTM 200 in-situ sample lift- out system allows the preparation of site TEM samples free from the need for support films