You are here: 首頁 Facilities Facilities Field-emission gun scanning electron microscope (NOVA NANO SEM 450)

Field-emission gun scanning electron microscope (NOVA NANO SEM 450)

Field-emission gun scanning electron microscope (NOVA NANO SEM 450)

Responsible teacher：

C. Robert Kao

Technican：

Mr. Hsueh-Ren Chen

Telephone：

886-2-3366-1348

Location：

Room 130, College of Engineering

Features：

1.FEG-SEM: Working voltage 50eV~30keV,current 0.6pA~200nA。

2.60-degree objective lens geometry.

3.Detectors:

a. In-lens SE detector (TLD-SE)

b. In-lens BSE detector (TLD-BSE) c. Everhardt-Thomley SED

4.Energy dispersive spectroscopy for qualitative and semi-quantitative analyses.